Tungsten (W) and Molybdenum (Mo) are widely used in key components of the vacuum coating industry due to their excellent high-temperature performance, good thermal conductivity, and corrosion resistance. Vacuum coating is commonly applied in optical films, decorative coatings, functional films, and semiconductor devices.
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Evaporation Sources and Heating Elements:
Tungsten and molybdenum wires and rods are used in resistive heating evaporation sources, capable of withstanding high temperatures without deformation.
Mo/W plates or crucibles serve as containers for materials in high-temperature evaporation or sputtering processes.
Targets and Evaporation Materials:
Mo and W can be used as sputtering targets in physical vapor deposition (PVD) processes.
They withstand high-temperature evaporation, ensuring purity and stability of the thin films.
Supports and Structural Components:
Internal supports, fixtures, and hangers in vacuum chambers are often made of Mo or W to minimize thermal expansion and increase service life.
High Melting Point and High-Temperature Strength: Tungsten melts at 3422°C, molybdenum at 2623°C, allowing stable operation under high-temperature evaporation.
Good Thermal Conductivity: Ensures uniform heating and prevents local overheating.
Low Vapor Pressure: Minimizes evaporation in a vacuum environment, ensuring film quality.
Corrosion Resistance: Stable in most evaporation materials and gaseous environments.
Optical thin film deposition: Mo plates used as crucible supports to improve evaporation uniformity.
Semiconductor device manufacturing: W targets for metal layer deposition.
Decorative coatings: Tungsten wire resistive heaters used for chrome or gold plating processes.
Overall, tungsten and molybdenum products are indispensable high-temperature durable components in vacuum coating equipment, significantly enhancing equipment life and film quality.
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